JPS6235058B2 - - Google Patents
Info
- Publication number
- JPS6235058B2 JPS6235058B2 JP53091758A JP9175878A JPS6235058B2 JP S6235058 B2 JPS6235058 B2 JP S6235058B2 JP 53091758 A JP53091758 A JP 53091758A JP 9175878 A JP9175878 A JP 9175878A JP S6235058 B2 JPS6235058 B2 JP S6235058B2
- Authority
- JP
- Japan
- Prior art keywords
- moisture
- dew condensation
- condensation sensor
- resistance
- powders
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000009833 condensation Methods 0.000 claims description 21
- 230000005494 condensation Effects 0.000 claims description 21
- 239000000843 powder Substances 0.000 claims description 20
- 239000004065 semiconductor Substances 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 13
- 239000012212 insulator Substances 0.000 claims description 9
- 229920000620 organic polymer Polymers 0.000 claims description 8
- 239000012528 membrane Substances 0.000 claims description 5
- 239000011148 porous material Substances 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 3
- 239000010408 film Substances 0.000 description 13
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 5
- 239000001856 Ethyl cellulose Substances 0.000 description 4
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- 229920001249 ethyl cellulose Polymers 0.000 description 4
- 235000019325 ethyl cellulose Nutrition 0.000 description 4
- KWGKDLIKAYFUFQ-UHFFFAOYSA-M lithium chloride Chemical compound [Li+].[Cl-] KWGKDLIKAYFUFQ-UHFFFAOYSA-M 0.000 description 4
- JIAARYAFYJHUJI-UHFFFAOYSA-L zinc dichloride Chemical compound [Cl-].[Cl-].[Zn+2] JIAARYAFYJHUJI-UHFFFAOYSA-L 0.000 description 4
- 239000004372 Polyvinyl alcohol Substances 0.000 description 3
- 229920002451 polyvinyl alcohol Polymers 0.000 description 3
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 229910002113 barium titanate Inorganic materials 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229920001477 hydrophilic polymer Polymers 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000004408 titanium dioxide Substances 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 235000005074 zinc chloride Nutrition 0.000 description 2
- 239000011592 zinc chloride Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 150000008065 acid anhydrides Chemical class 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 235000019441 ethanol Nutrition 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 229920003169 water-soluble polymer Polymers 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9175878A JPS5518947A (en) | 1978-07-26 | 1978-07-26 | Dew formation sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9175878A JPS5518947A (en) | 1978-07-26 | 1978-07-26 | Dew formation sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5518947A JPS5518947A (en) | 1980-02-09 |
| JPS6235058B2 true JPS6235058B2 (en]) | 1987-07-30 |
Family
ID=14035434
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9175878A Granted JPS5518947A (en) | 1978-07-26 | 1978-07-26 | Dew formation sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5518947A (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6221052A (ja) * | 1985-07-19 | 1987-01-29 | Tokyo Kosumosu Denki Kk | 結露センサ |
-
1978
- 1978-07-26 JP JP9175878A patent/JPS5518947A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5518947A (en) | 1980-02-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| GB2025068A (en) | Humidity sensitive device | |
| US4497701A (en) | Humidity sensitive device | |
| JPS59202052A (ja) | 感湿素子 | |
| WO1993016377A1 (en) | Humidity sensor and its manufacture | |
| JPS6235058B2 (en]) | ||
| US3703697A (en) | Relative humidity sensor | |
| JPH0244390B2 (ja) | Kanshitsuzairyo | |
| JP2677991B2 (ja) | 感湿素子 | |
| GB2135781A (en) | Humidity sensitive device | |
| JPH0552795A (ja) | 感湿素子 | |
| JPS6116935B2 (en]) | ||
| JPS6122901B2 (en]) | ||
| JPH09264866A (ja) | 炭酸ガスセンサ及びその製造方法 | |
| JPS58166701A (ja) | 感湿素子の製造方法 | |
| JPH0218310B2 (en]) | ||
| JP2959122B2 (ja) | 感湿素子 | |
| JPH0611474A (ja) | 湿度センサ | |
| KR840000260B1 (ko) | 감습소자 | |
| JPS594102A (ja) | 感湿素子 | |
| JPH05302908A (ja) | 感湿素子 | |
| JPH04359141A (ja) | 感湿素子 | |
| JPH04238260A (ja) | 感湿素子 | |
| JPH0827248B2 (ja) | オゾンセンサ | |
| JPS6317203B2 (en]) | ||
| JPS58138001A (ja) | 湿度検知素子 |